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Experimental Investigation of a Micro Vortex Diode
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This report MUST be re-edited and proper English syntax and
grammar MUST be used. It is next to impossible to follow the
description. There is no underlying theory to support it.
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The microvalves obtained a vital role in vaporous and fluid liquid vehicle and control
marvels. These diodes act as pressure-driven singularities with impedances relying upon the
heading of the stream. Along these lines, for a given distinction of weight, the outright estimation
of the stream rate contrasts with the bearing of the applied weight inclination: this characterizes
the alleged forward and turn around streams. For each estimation of the weight distinction, the
productivity of the diode is characterized as the contrast between the forward and the opposite
streams, standardized by the forward stream.
For the microdiodes carrying on as microvalves with a high spillage rate, it is critical to
focus on the most elevated productivity, by upgrading the plan. This prompts producing
challenges and to an unwavering quality constrained by breaking or obstructing dangers,
especially with complex liquids1. An elective arrangement comprises utilizing microdiodes,
which can in various cases assume the job of microvalves without moving parts. Additionally, its
structure is more advanced than the plan of the recently referred to diodes, which offers bigger
enhancement viewpoints using CAD software.
It has never been made and tried in micrometric measurements. The laminarization of the
stream with the scaling down doesn't permit an immediate misuse of the outcomes set up for
vortex diodes of a millimetric size. The rule of this diode, called a vortex diode. Its proficiency is
fabricated on millimetric measurements, and commonly higher than that of different kinds of
diode2. The dimension of the proposed CAD model as shown on figure 1 below.
Amirouche, Farid & Zhou, Yu & Johnson, Tom. (2009). Current Micropump Technologies and their Biomedical
Applications. Microsystem Technologies. 15. 647-666. 10.1007/s00542-009-0804-7.
Figure 1: Vortex micro diode CAD Model
This model to be proposed that been recorded and reported in this paper has its specifications as
𝑎 = 500 𝜇𝑚
𝑏 = 750 𝜇𝑚
𝑐 = 150 𝜇𝑚
𝑑 = 80 𝜇𝑚
𝑙 = 210 𝜇𝑚
𝐿 = 750 𝜇𝑚
𝑤 = 200 𝜇𝑚
Figure 2: Process Step
Figure 2: Schematic representation of reference vortex diode from Anduze et al. .
Figure 3: Process setup
Figure 4: Microdiode SEM
For the first procedure, 3 µm thick resist layer is kept on the front side, going about as a
veil layer for the profound responsive particle carving (DRIE) as shown on figure 3. In the
process, we abstain from faceting impacts because of the presence of new planes for open edges
and bringing about auxiliary twisting as respects to the underlying structure3. The utilization of a
non-remunerated cover and the concealment of a silicon nitride testimony step disentangle the
The upside of DRIE would be the verticality of the dividers of the scratched structures is
regarded freely of crystallographic direction of the cover. So as to maintain a strategic distance
from any mechanical distortion of the final structure when a distinction of weight is applied
which can be up to 105 Pa, the microdiode is stuck to a 1 mm thick stainless-steel plate (20 x 20
mm2) and 100 µm thick.
Flow rates are estimated both upstream and downstream from the microdiode, which
empowers outlet of the microdiode, which is important to identify potential breaks and to
Zhang, D.; Lv, J.; Jiang, Y.; Chen, H.; Fu, J. A (2014). A piezoelectric microvalve with a flexure-hinged driving frame
and microfabricated silicon sealing pair. Mechatronics, 24, 511–518.
improve accuracy and its functionality4. The microsystems just as the metrology segments are
restricted in an encompassing chamber, the temperature of 298–328 K. Another testing process is
the used of flow of water at T 293 K. With respect to vortex microdiode, the proficiency is better
than for a progression of isopropanol. For a 105 Pa pressure contrast, the proficiency runs from
0.16 to 0.27 tentatively and from 0.14 to 0.29 numerically. Once more, a methodical discrepancy
among simulation and test under 9%, as shown on figure 4 below:
Figure 5: Flow of water at 293K
Figure 6: OP = 105 Pa & T = 298 K
The Reynolds number is presently somewhere in the range of 100 and 800. The result in
this testing and simulation process empowering for the assessment of the productive
optimization. The formulation of the vortex micro diodes should be contemplated, this part being
Olsson, P. Enoksson, G. Stemme, E. Stemme, (1995). A valve-less planar pump in silicon, in: Proceedings of the
Transducers ‘95/Eurosensors IX, Stockholm, Sweden, pp. 291–294
regularly approached to work in a beat system, when connected to a micro pump. The numerical
reproduction has end up being a prescient instrument. Thus, it will be utilized to check the
impact of the various measurements as shown on the figure 1 design and to check whether the
structure can be improved.
 Amirouche, Farid & Zhou, Yu & Johnson, Tom. (2009). Current Micropump
Technologies and their Biomedical Applications. Microsystem Technologies. 15. 647666. 10.1007/s00542-009-0804-7.
 Zhang, D.; Lv, J.; Jiang, Y.; Chen, H.; Fu, J. A (2014). A piezoelectric microvalve
with a flexure-hinged driving frame and microfabricated silicon sealing pair.
Mechatronics, 24, 511–518.
 Olsson, P. Enoksson, G. Stemme, E. Stemme, (1995). A valve-less planar pump in
silicon, in: Proceedings of the Transducers ‘95/Eurosensors IX, Stockholm, Sweden, pp.
School of Engineering
ME304 Mechanical Measurements II
Final Project: Experimental Investigation of a Micro Vortex Diode
Part B – Data Analysis.
Each team must conduct data analysis and provide a final report. You must complete your Part A
report by including the following sections: Results, Discussions, and Conclusions.
Each team must also upload their CAD files. The CAD file should be exported in either
Parasolid, IGES, or STEP format.
The data needed to perform your analysis can be found in an Excel file that has been uploaded in
the “Final Project – Part B” assignment on Canvas.
Then students will be asked to compute efficiency and diodicity along with
Delta P (x 10e4) Pa
Q (x 10e-8) m3/s
Q (x 10e-8 m3/s)
Experimental Results (Anduze et el.)
Q (x 10e-8) m3/s
Delta P (x 10e4) Pa
Delta P (104 Pa)