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PROBLEM 5.48 KNOWN: The chuck of a semiconductor processing tool, initially at a uniform temperature of Ti = 100°C, is cooled on its top surface by supply air at 20°C with a convection coefficient of 50 W/m2⋅K. FIND: (a) Time required for the lower surface to reach 25°C, and (b) Compute and plot the time-to-cool as a function of the convection coefficient for the range 10 ≤ h ≤ 2000 W/m2⋅K; comment on the effectiveness of the head design as a method for cooling the chuck. SCHEMATIC: ASSUMPTIONS: (1) One-dimensional, transient conduction in the chuck, (2) Lower surface is perfectly ...
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