Transport Phenomena in Chemical Vapor-Deposition Systems

Jun 30th, 2015
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Algoma University College
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Chemical vapor deposition (CVD) refers to the formation of a crystalline material on a substrate by the reaction of the chemicals from the vapor phase using an activation energy. A schematic presentation of the sequence of various steps involved in a CVD process is shown in After the initial reactants are transported to the reaction zone above the susceptor (step l), they undergo a series of chemical reactions and generate new reactive species and intermediates .

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ADVANCES IN HEAT TRANSFER, VOLUME 28Transport Phenomena in ChemicalVapor-Deposition SystemsROOP L. MAHAJANDepartment of Mechanical Engineering, University of Colorado, Boulder, ColoradoI. IntroductionA.SCOPEChemical vapor deposition (CVD) refers to the formation of a crystallinematerial

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