Excimer laser

May 29th, 2016
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This is a detailed description of excimer laser trends.

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Running head: EXCIMER LASER TRENDS1Excimer lacer trendsNameCourseTutorInstitutionDateEXCIMER LASER TRENDS2Excimer laser is a form of ultraviolet laser commonly used in the production ofmicroelectronics, flat panel display, automotive industries, and medical devices. The commercialexcimer laser technology has evolved over the years. In 1987, the excimer laser tubes were madeof organic polymers which were later advanced in 1994 with the introduction of the all-metalceramic laser tube design. Moreover, in 1998, the laser operational lifetime and output beamstability were further improved with the introduction of the sliding discharge soft preionizationscheme. In the recent years, the core innovations and constant performance improvements haveturned lasers to being a cost-effective and pulsed ultraviolet laser technology. The followingessay will discuss on the technical aspects of exclaimer lasers relevant for PLD and resultingoutput energy.The pulsed laser deposition (PLD) in thin film research lab is performed at a lowrepetition rate between 1 and 10 Hz which produces less than a hundred thousand laser pulsesper day thus corresponding to extremely low duty cycle use. The ablation lasers and excimerlasers are compacted at pulse energies of 200-1100 mJ and at a wavelength of 248nm thussupporting a large range of ablation fluencies between 0.3 and 30 J cm-2. As a result of theexcimer laser in a PLD laboratory delaying in the off state, the yearly gas

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