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What Are MEMS ?• Micro - Small size, microfabricated structures• Electric - Electrical signal / control ( In / Out ) • Mechanical - Mechanical functionality (In / Out )• Systems - Structures, Devices, Systems

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Study of MemsMicro-Electro-MechanicalSystems (MEMS)What Are MEMS ? Micro - Small size, microfabricated structures Electric - Electrical signal / control ( In / Out ) Mechanical - Mechanical functionality (In / Out ) Systems - Structures, Devices, Systems- Control Energy Domains Thermal (temperature, heat and heat flow) Mechanical (force, pressure, velocity, acceleration, position) Chemical (concentration, pH, reaction rate) Magnetic (field intensity, flux density, magnetization) Radiant (intensity, wavelength, polarization, phase) Electrical (voltage, charge, currentMultidisciplinaryINTRODUCTION Microelectromechanical systems(MEMS) (also written asmicro-electro-mechanical,MicroElectroMechanicalormicroelectronic and microelectromechanical systems) is the technology of very small devices; it merges at the nano-scale intonanoelectromechanical systems(NEMS). MEMS are also referred to asmicromachines(in Japan), ormicro systems technologyMST(in Europe). MEMS are separate and distinct from the hypothetical vision ofmolecular nanotechnologyormolecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1mm), and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre (i.e. 0.02 to 1.0mm). They usually consist of a central unit that processes data (the microprocessor) and several components that i

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